覆晶键合机 PHOENIX MYriad

产品介绍

• 8 Heads / 1 Table Bonding System 

• ± 3um @ 3σ Accuracy 

• UPH : > 10k 

• Chip Size: 0.5mm up to 32mm 

• Wafer Size : 12-inch Or Panel Size :330x330mm

• Auto Bond Head / Bond Table Tilt Adjustment 

• Fluxing: Soaking; Dipping; Dispensing 

• Configurable To: -Multiple Chip Input -OHT Handler System 

• Material Input: Wafer (FFC); Chip on JEDEC/Waffle Pack/TnR 

• Output Type: Wafer 

• Multi-Layer Bonding Capability 

• Product: CoS; CoC; CoW; CoP