Product

CoW (Big Die)

M/C Model

Phoenix Uni/DuadProFX-W

UniPro: 1H1T  

DuadPro: 1H1T x 2--> 2H2T

Die Size

1~110mm

Input Type

8"/12" Wafer (FFC)；Jedec Tray; Tape

Output Type

Wafer : 8" or 12" 350mm x 350mm

Accuracy

X, Y: ±1.0um @ 3σ

Theta: ±0.02°@ ±3σ

Force Range

a. 1N~100N (L)

b. 5N~200N (M)

c. 10N~500N (H)

Fluxing

Soak; Dipping; Dispensing (optional)

UPH Configuration

Machine Tact Time: 2.5s

Product

CoW; CoWoS